CVD Tube Furnace

YBOTECH CVD Tube Furnace (Chemical Vapor Deposition) refers to the method of chemical gas or steam reacting on the surface of the substrate to synthesize coatings or nanomaterials. It is the most widely used technology in the semiconductor industry to deposit a variety of materials, including a wide range of insulating materials, most metallic materials and metal alloy materials.

gradeFurnace Shell
  1. The shell is made of metal Q235 low-carbon steel, and the surface is electrostatically resistant and resistant to corrosion.
  2. The solid double-layer metal frame is combined with the heat-insulating fan structure, and the furnace surface temperature is low.
  3. Horizontal use mode, upper opening structure, easy to operate.
gradeRefractory Material

Multi-layer insulation design, composed of lightweight alumina ceramic fiber and high-quality insulation board backing, does not contain asbestos components, low heat loss and low energy consumption

gradeHeating System
  1. High-quality HRE spiral resistance wire heating element is safely and firmly embedded on the inner surface of the furnace, thermal radiation heating in the furnace cavity, which is energy-saving and efficient, long service life.
  2. Ring heating by resistance wire to achieve good uniformity in the furnace.
gradeTemperature Control Panel
  1. PID with SSR/SCR control mode, precise temperature control.
  2. International standard thermocouple, long service life.
  3. Equipped with heating indicator light and over-temperature alarm buzzer.
gradeProgram Controller
  1. Advanced controllers that meet complex process requirements.
  2. Simple and direct operation, flexible programming.
  3. Programmable 32 program segments.
  4. Over temperature and fault alarm, automatic safety protection.
gradeVacuum Atmosphere Function
  1. With 304 stainless steel sealing flange to obtain vacuum or atmosphere in the furnace tube.
  2. High-quality quartz glass working tube, and metal or corundum working tube can also be selected to adapt to different working conditions.
  3. The high-performance bipolar rotary vane vacuum pump can obtain a vacuum degree of 5pa, and the digital vacuum gauge can display the vacuum degree.
  4. With air circuit control unit, the control unit can choose 1-3 way MFC automatic control system.

CVD Tube Furnace

Technical Specification

Item YBGC-25-12 YBGC-40-12 YBGC-60-12 YBGC-80-12 YBGC-100-12 YBGC-120-12
Tube Size Φ25x800mm Φ40x1000mm Φ60x1000mm Φ80x1000mm Φ100x1000mm Φ120x1000mm
Max Temperature 1200℃
Work Temperature 1100℃
Heating Zone 440mm
Voltage/Power 220V/1.8KW 220V/1.8KW 220V/2.6KW 220V/2.6KW 220V/2.6KW 220V/5KW
Heating Element HRE alloy resistance wire
Chamber Material Polycrystalline inorganic alumina ceramic fiber material prepared by wet vacuum filtration
Tube Material Quartz Tube
Temperature Accuracy ±1℃
Thermocouple N type thermocuple
Temperature Controller Intelligent microcomputer PID temperature control instrument, SCR/SSR control, PID parameter self-tuning function; programmable 4 groups of 8 program segments, program heating, program heat preservation, program cooling
Heating Rate 1-25℃/min freely set
Furnace Structure Furnace temperature control integrated structure, furnace opening and closing; double-layer shell, air circulation and heat insulation
Sealing Function Both ends of the furnace tube are equipped with stainless steel metal flanges, matched with high-temperature PTFE gaskets, which can work under vacuum with a vacuum degree of ≤5pa (rotary vane vacuum pump)
Atmosphere Performance There are air inlets and outlets at both ends of the flange. The pressure gauge is installed on the metal flange. The precision needle valve can adjust the air intake and output, and can be fed with protective gases such as nitrogen, argon, and hydrogen.
Equipment Safety Modular control, sound and light alarm signal will be sent out for over temperature and broken coupler in the working process, and the protection action will be completed automatically
Safety Protection The equipment is equipped with a circuit breaker, which will automatically pop open in case of short circuit leakage, which can protect the safety of equipment and operators
Furnace Shell High-quality cold-rolled steel plate CNC machine tool blanking processing, after welding, grinding, polishing, phosphating, pickling, surface electrostatic spraying plastic powder
Quality Certificate ISO9001   CE
Standard Accessroies 1. Furnace Body  2. Temperature Controller 3. Power Cable 3 meters  4.Thermocouple  5.Manual
6. Furnace Hook 7. One pair of high temperature gloves 8. Two pipe plugs  9. One set of sealing flange
Optional Accessories  1. Optional rotary vane vacuum pump (vacuum degree ≤ 5pa  2. Optional digital vacuum gauge (1.0×105-1.0×10-1pa)  3. Optional float flowmeter (range 60-600ml/min)  4. Optional with quartz boat

CVD Tube Furnace


1. Furnace body 1 set
2. Temperature controller 1
3. Power cord 3 meters 1
4. Thermocouple 1
5. Instruction manual 1
6. Crucible pliers 1
7. High temperature gloves 1 pair

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